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| Adjustments for Part Geometry
Figure 15 shows that characteristic x-rays exit a flat sample in a cone roughly 30° above the surface: |
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Characteristic x-rays do not exit the sample below 30° because they must travel through a distance of material b which is great enough to completely absorb the x-rays. Distance a is not so large that the x-rays will be absorbed. Figure 16 shows how curved surfaces reduce distance b and increase the count rates seen by the detector: |
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As the count rates increase, the measurement will increase relative to it's actual value. This can happen on small features like gate arrays where the solder has domed during hot air leveling. The effect can be eliminated by proper sample positioning and collimator selection. First, place all samples so that the axis of the curve is perpendicular to the axis of the detector and position the measuring area back from the edge of the feature which is toward the detector. This will present a relatively flat surface on the detector side which will provide an absorption effect as shown in Figure 2. It is also important to select a collimator according to Figure 17: |
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Abstract |
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